LASER PRODUCED PLASMA BROADBAND LIGHT SOURCES

XWS series products

ISTEQ’s XWS light source products have been specially developed to be used for a variety of applications, including spectroscopy, high resolution microscopy, thin - film measurement, surface metrology and others. These sources are based on cutting-edge technology, covered by world-wide patents. ​

XWS-30

Compact broadband plasma light source​




XWS-65

Broadband plasma light source​




XWS-X

High UV broadband plasma light source​






The spectral range of the XWS broadband light source is available in 2 configurations, dependent on their applications

Ozone-free configuration
spectral range from 240 nm to 2700 nm

UV configuration
spectral range from 185 nm to 2700 nm

Main advantages
  • CW Laser plasma discharge
  • Broad spectral range 190-2500 nm
  • High spectral brightness
  • High temporal and spatial stability STD < 0.15
  • Long life time due to electrodeless
  • The small dimensions of the emitting volume considerable expand the range of XWS applications
  • External source control of parameters monitoring via Software, Windows GUI



    • APPLICATIONS

    • Absorption and fluorescence spectroscopy
    • Diagnostics systems in microelectronics and defect control
    • Surface metrology, ellipsometry and scatterometry
    • Microscopy, including confocal and fluorescence
    • Optical component testing
    • Detectors in chromatography, microfluidics, lab-on-a-chip,
      droplet spectrometers, cytofluorimeters, etc.

    XWS SPECIFICATIONS

    MODEL XWS-30 XWS-65 XWS-X
    SOURCE PERFORMANCE
    Spectral range 190 - 2500 nm​ UV configuration
    Spectral range 250 - 2500 nm OFR configuration
    Maximum spectral brightness for UV configuration
    (avg for 350 - 550 nm), mW / (mm²·nm·sr), min / avg / max    		 34/42/48 50/58/68 105/120/130
    Maximum spectral brightness for OFR configuration
    (avg for 350 - 550 nm), mW / (mm²·nm·sr), min / avg / max    		 50/56/60
    Output power Free space up to 1 W up to 1.8 W up to 1.5 W
    Output power via fiber 600 µm, mW​ min / avg / max 300 / 319 / 350 510 / 560 / 630 510 / 575 / 650
    Emitting body size for UV configuration (spectral range 350 - 550 nm), µm 160x320 160x360 150x260
    Lifetime (hours) 10000 10000 10000
    Temporal and spatial stability STD < 0.15% STD < 0.15% STD < 0.05%
    Lamp medium Xenon Xenon Xenon
    MODEL XWS-30 XWS-65 XWS-X
    OPTIONAL CONFIGURATIONS
    Free space light output (default)
    Retroreflector (Single port output only)
    Dual port output
    FCU light output
    Air-cooled Optical Head
    Water-cooled Optical Head
    MODEL XWS-30 XWS-65 XWS-X
    OPTICAL HEAD DESIGN
    Free space output NA (by default) 0.5 0.4 0.4
    Maximum output NA (upon request) 0.6 0.5 0.5
    External optic interface C-mount,
    30 Optical cage    		 C-mount,
    30 Optical cage    		 C-mount,
    30 Optical cage
    Distance from plasma to output window, mm 14,4 21,5 21,5
    Fiber interface (only for FCU version) SMA or FC SMA or FC SMA or FC
    MODEL XWS-30 XWS-65 XWS-X
    ADDITIONAL FEATURES
    External control USB
    RS-485 adapter    		 RJ45
    (Ethernet,
    Web interface),
    COM-port
    (RS-232)    		 RJ45
    (Ethernet,
    Web interface),
    COM-port
    (RS-232)
    Interlock / Remote plasma control LEMO FGG DB-15 Connector DB-15 Connector
    MODEL XWS-30 XWS-65 XWS-X
    DIMENSIONS
    Optical head dimensions (mm) 149x166x145​ 130x122x106 130x122x106
    Power supply dimensions (mm) 210x85x46 351x175x232 351x175x232
    Water cooled optical head dimensions (mm) - 113x150x106 113x150x106
    Liquid cooling unit dimensions (mm) - 350x166x184 350x166x184
    MODEL XWS-30 XWS-65 XWS-X
    FACILITY REQUIREMENTS
    Electrical 100 - 240 V,
    50/60 Hz    		 100 - 240 V,
    ​50/60 Hz    		 100 - 240 V,
    ​50/60 Hz
    Gas purging (only for UV configuration) Nitrogen 99,99% Nitrogen 99,99% Nitrogen 99,99%

    TECHNOLOGY

    Find out more information about the technology of the broadband plasma light sources.




    Custom design

    Upon a request it is possible to modify ISTEQ serial products to meet customer requirements